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Getter Pump - List of Manufacturers, Suppliers, Companies and Products

Getter Pump Product List

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Getter Pump "Magic NEG Pump"

Installation direction is free! NEG pump for generating ultra-high vacuum using pill NEG.

The "Magic NEG Pump" is a new concept getter pump that extends its exhaust capability to the ultra-high vacuum (XHV) range. To minimize the hydrogen gas generated by the pump itself, we have restructured the pump's materials and design. By combining this product with auxiliary pumps such as turbo molecular pumps (open system) or small ion pumps (sealed system), it is possible to achieve XHV levels in the range of 10^-10 Pa within 24 hours from atmospheric pressure. 【Features】 ■ NEG is arranged on the walls of the pump casing ■ Ultra-low gas release pump casing made of 0.2% BeCu alloy ■ Effective exhaust speed extended to the 10^-10 Pa range ■ High exhaust speed for CO (comparable to H2) ■ Compatible with SUS ICF070 & 114 flanges *For more details, please refer to the PDF document or feel free to contact us.

  • Other pumps

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Getter Pump Insi torr "Fast Pump"

It is a ultra-high vacuum pump based on non-evaporable getter (NEG) technology.

The Getter Pump "Insi Torr Fast Pump" is an ultra-high vacuum pump based on the non-evaporative getter NEG technology developed by the Saes Group. This pump was developed for Applied Materials' PVD and aluminum sputtering processes. The development of this pump significantly reduces the time it takes for the chamber to vent and return to operation. 【Features】 - By installing the in-situ fast pump inside the chamber, downtime is reduced from 11 hours to 7 hours. - Can be retrofitted to existing equipment. - Enhances upgrading without affecting the footprint. - Does not negatively impact particle characteristics or film properties. For more details, please contact us or download the catalog.

  • Vacuum pump

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